Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538677 | Systems and methods for depositing high density and high tensile stress films | Chuanxi Yang, Hang Yu, Yu-Chi Yang, Chuan Ying Wang, Xinhai Han +2 more | 2022-12-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538677 | Systems and methods for depositing high density and high tensile stress films | Chuanxi Yang, Hang Yu, Yu-Chi Yang, Chuan Ying Wang, Xinhai Han +2 more | 2022-12-27 |