Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538677 | Systems and methods for depositing high density and high tensile stress films | Hang Yu, Yu-Chi Yang, Chuan Ying Wang, Allison Yau, Xinhai Han +2 more | 2022-12-27 |
| 11515145 | Deposition of silicon boron nitride films | Hang Yu, Deenesh Padhi | 2022-11-29 |