Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276570 | Multi-layer deposition and treatment of silicon nitride films | Vinayak Veer Vats, Seoyoung LEE, Hang Yu | 2022-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276570 | Multi-layer deposition and treatment of silicon nitride films | Vinayak Veer Vats, Seoyoung LEE, Hang Yu | 2022-03-15 |