Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11401607 | TiSiN coating method | M. Ziaul Karim, Bo Seon Choi | 2022-08-02 |
| 11276570 | Multi-layer deposition and treatment of silicon nitride films | Byung Kook Ahn, Seoyoung LEE, Hang Yu | 2022-03-15 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand, Lakmal C. Kalutarage +6 more | 2022-01-04 |