Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515149 | Deposition of flowable silicon-containing films | Mark Saly, David Thompson, Abhijit Basu Mallick, Tejasvi Ashok, Pramit Manna | 2022-11-29 |
| 11417515 | Methods for depositing blocking layers on metal surfaces | Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2022-08-16 |
| 11398388 | Methods for selective dry etching gallium oxide | Feng Q. Liu, Lisa J. Enman, Mark Saly | 2022-07-26 |
| 11393678 | Low-k dielectric films | William J. Durand, Mark Saly, Kang Sub Yim, Shaunak Mukherjee | 2022-07-19 |
| 11371136 | Methods for selective deposition of dielectric on silicon oxide | Bhaskar Jyoti Bhuyan, Mark Saly, David Thompson, Rana Howlader | 2022-06-28 |
| 11289328 | Deposition and etch processes of chromium-containing thin films for semiconductor manufacturing | Thomas Knisley, Mark Saly, David Thompson | 2022-03-29 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand +6 more | 2022-01-04 |