| 11536708 |
Methods to fabricate dual pore devices |
Keenan N. Woods, Joseph R. Johnson, Bhaskar Jyoti Bhuyan, William J. Durand, Michael P. Chudzik +2 more |
2022-12-27 |
$54,393,000 |
| 11532474 |
Deposition of rhenium-containing thin films |
Thomas Knisley, Keenan N. Woods, Charles H. Winter, Stefan Cwik |
2022-12-20 |
$39,023,000 |
| 11515156 |
Methods for depositing blocking layers on conductive surfaces |
Bhaskar Jyoti Bhuyan, Wenyi Liu |
2022-11-29 |
$23,914,000 |
| 11515149 |
Deposition of flowable silicon-containing films |
Lakmal C. Kalutarage, David Thompson, Abhijit Basu Mallick, Tejasvi Ashok, Pramit Manna |
2022-11-29 |
$23,914,000 |
| 11473198 |
Homoleptic lanthanide deposition precursors |
Thomas Knisley |
2022-10-18 |
$26,737,000 |
| 11450525 |
Selective aluminum oxide film deposition |
Liqi Wu, Hung T. Nguyen, Bhaskar Jyoti Bhuyan, Feng Q. Liu, David Thompson |
2022-09-20 |
$25,949,000 |
| 11447865 |
Deposition of low-κ films |
Shuaidi Zhang, Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Thomas Knisley |
2022-09-20 |
$25,949,000 |
| 11417515 |
Methods for depositing blocking layers on metal surfaces |
Bhaskar Jyoti Bhuyan, Lakmal C. Kalutarage, Thomas Knisley |
2022-08-16 |
$38,686,000 |
| 11408068 |
Deposition of tellurium-containing thin films |
Thomas Knisley, Keenan N. Woods, Charles H. Winter, Apoorva Upadhyay |
2022-08-09 |
$67,965,000 |
| 11398388 |
Methods for selective dry etching gallium oxide |
Feng Q. Liu, Lisa J. Enman, Lakmal C. Kalutarage |
2022-07-26 |
$63,545,000 |
| 11390638 |
Molybdenum(VI) precursors for deposition of molybdenum films |
Andrea Leoncini, Paul Mehlmann, Nemanja Dordevic, Han Vinh Huynh, Doreen Wei Ying Yong +2 more |
2022-07-19 |
$63,937,000 |
| 11393678 |
Low-k dielectric films |
William J. Durand, Lakmal C. Kalutarage, Kang Sub Yim, Shaunak Mukherjee |
2022-07-19 |
$63,937,000 |
| 11384648 |
Methods for depositing coatings on aerospace components |
Yuriy Melnik, Sukti Chatterjee, Kaushal Gangakhedkar, Jonathan Frankel, Lance A. Scudder +4 more |
2022-07-12 |
$30,931,000 |
| 11371136 |
Methods for selective deposition of dielectric on silicon oxide |
Bhaskar Jyoti Bhuyan, David Thompson, Lakmal C. Kalutarage, Rana Howlader |
2022-06-28 |
$26,475,000 |
| 11342481 |
Preclean and encapsulation of microLED features |
Thomas Knisley, Bhaskar Jyoti Bhuyan, Mingwei Zhu |
2022-05-24 |
$75,273,000 |
| 11286564 |
Tin-containing precursors and methods of depositing tin-containing films |
Thomas Knisley, David Thompson |
2022-03-29 |
$46,373,000 |
| 11289328 |
Deposition and etch processes of chromium-containing thin films for semiconductor manufacturing |
Thomas Knisley, Lakmal C. Kalutarage, David Thompson |
2022-03-29 |
$46,373,000 |
| 11239091 |
Etching of metal oxides using fluorine and metal halides |
Keenan N. Woods, Zhenjiang Cui |
2022-02-01 |
$81,914,000 |
| 11217443 |
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates |
Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand +6 more |
2022-01-04 |
$136,975,000 |
