Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515151 | Methods and precursors for selective deposition of metal films | Kurt Fredrickson, Atashi Basu, Ning Li | 2022-11-29 |
| 11447865 | Deposition of low-κ films | Shuaidi Zhang, Ning Li, Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2022-09-20 |
| 11371144 | Low-k films | Shuaidi Zhang, Ning Li | 2022-06-28 |
| 11359281 | Selective deposition of SiCON by plasma ALD | Shuaidi Zhang, Ning Li | 2022-06-14 |
| 11270914 | Method of forming self-aligned via | Suketu Arun Parikh | 2022-03-08 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand +6 more | 2022-01-04 |