Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11447865 | Deposition of low-κ films | Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Mark Saly, Thomas Knisley | 2022-09-20 |
| 11371144 | Low-k films | Ning Li, Mihaela Balseanu | 2022-06-28 |
| 11359281 | Selective deposition of SiCON by plasma ALD | Ning Li, Mihaela Balseanu | 2022-06-14 |