| 11532474 |
Deposition of rhenium-containing thin films |
Keenan N. Woods, Mark Saly, Charles H. Winter, Stefan Cwik |
2022-12-20 |
| 11473198 |
Homoleptic lanthanide deposition precursors |
Mark Saly |
2022-10-18 |
| 11466364 |
Methods for forming protective coatings containing crystallized aluminum oxide |
Kenichi Ohno, Eric Liu, Sukti Chatterjee, Yuriy Melnik, David Alexander BRITZ +2 more |
2022-10-11 |
| 11447865 |
Deposition of low-κ films |
Shuaidi Zhang, Ning Li, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Mark Saly |
2022-09-20 |
| 11417515 |
Methods for depositing blocking layers on metal surfaces |
Bhaskar Jyoti Bhuyan, Mark Saly, Lakmal C. Kalutarage |
2022-08-16 |
| 11408068 |
Deposition of tellurium-containing thin films |
Keenan N. Woods, Mark Saly, Charles H. Winter, Apoorva Upadhyay |
2022-08-09 |
| 11384648 |
Methods for depositing coatings on aerospace components |
Yuriy Melnik, Sukti Chatterjee, Kaushal Gangakhedkar, Jonathan Frankel, Lance A. Scudder +4 more |
2022-07-12 |
| 11342481 |
Preclean and encapsulation of microLED features |
Bhaskar Jyoti Bhuyan, Mark Saly, Mingwei Zhu |
2022-05-24 |
| 11306394 |
Iridium precursors for ALD and CVD thin film deposition and uses thereof |
— |
2022-04-19 |
| 11286564 |
Tin-containing precursors and methods of depositing tin-containing films |
Mark Saly, David Thompson |
2022-03-29 |
| 11289328 |
Deposition and etch processes of chromium-containing thin films for semiconductor manufacturing |
Mark Saly, Lakmal C. Kalutarage, David Thompson |
2022-03-29 |