Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315763 | Shaped electrodes for improved plasma exposure from vertical plasma source | Dmitry A. Dzilno, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka | 2022-04-26 |
| 11315769 | Plasma source for rotating susceptor | Anantha K. Subramani, John C. Forster, Philip Allan Kraus, Farzad Houshmand, Hanhong Chen | 2022-04-26 |