Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501955 | Modular high-frequency source with integrated gas distribution | Hanh Nguyen, Philip Allan Kraus | 2022-11-15 |
| 11488796 | Thermal break for high-frequency antennae | Hanh Nguyen, Philip Allan Kraus | 2022-11-01 |
| 11404248 | Modular microwave plasma source | Philip Allan Kraus | 2022-08-02 |
| 11393661 | Remote modular high-frequency source | Hanh Nguyen, Philip Allan Kraus | 2022-07-19 |
| 11217443 | Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates | Vinayak Veer Vats, Hang Yu, Philip Allan Kraus, Sanjay Kamath, William J. Durand +6 more | 2022-01-04 |