Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532463 | Semiconductor processing chamber and methods for cleaning the same | Vishwas Kumar Pandey, Bushra Afzal, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez | 2022-12-20 |
| 11515129 | Radiation shield modification for improving substrate temperature uniformity | Elizabeth Neville, Satish Radhakrishnan, Kartik Shah, Venkata Sharat Chandra Parimi, Sungwon Ha | 2022-11-29 |
| 11515176 | Thermally controlled lid stack components | Siva Chandrasekar, Satish Radhakrishnan, Rajath Kumar Lakkenahalli Hiriyannaiah, Viren Kalsekar | 2022-11-29 |