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Gas injector with baffle |
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| 11515129 |
Radiation shield modification for improving substrate temperature uniformity |
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2022-11-29 |
| 11501954 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more |
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| 11492704 |
Chamber injector |
Shu-Kwan LAU, Lit Ping LAM, Preetham Rao, Ian Ong, Nyi O. Myo +1 more |
2022-11-08 |
| 11486038 |
Asymmetric injection for better wafer uniformity |
Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Tobin Kaufman-Osborn +3 more |
2022-11-01 |
| D959490 |
Display screen or portion thereof with graphical user interface |
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2022-08-02 |
| 11239058 |
Protective layers for processing chamber components |
Karthikeyan Balaraman, Balamurugan Ramasamy, Mats Larsson, Kevin A. PAPKE, Rajasekhar PATIBANDLA +2 more |
2022-02-01 |
