Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11529592 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Sairaju Tallavarjula +4 more | 2022-12-20 |
| 11501945 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2022-11-15 |
| 11501954 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2022-11-15 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more | 2022-11-01 |
| 11322347 | Conformal oxidation processes for 3D NAND | Johanes F. Swenberg, Taewan Kim, Erika HANSEN | 2022-05-03 |