| 11529592 |
Gas injector with baffle |
Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more |
2022-12-20 |
| 11532463 |
Semiconductor processing chamber and methods for cleaning the same |
Vinay Prabhakar, Bushra Afzal, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez |
2022-12-20 |
| 11515132 |
Physical vapor deposition processing systems target cooling |
Sanjay Bhat, Vibhu Jindal |
2022-11-29 |
| 11501945 |
Side inject designs for improved radical concentrations |
Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2022-11-15 |
| 11501954 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more |
2022-11-15 |
| 11486038 |
Asymmetric injection for better wafer uniformity |
Eric Kihara Shono, Christopher S. Olsen, Kartik Shah, Hansel LO, Tobin Kaufman-Osborn +3 more |
2022-11-01 |
