Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11529592 | Gas injector with baffle | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2022-12-20 |
| 11515130 | Fast response pedestal assembly for selective preclean | Chaitanya A. PRASAD | 2022-11-29 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2022-11-01 |
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN, Dongming Iu +1 more | 2022-05-31 |
| 11268193 | Gas injection apparatus with heating channels | Agus Sofian Tjandra, Emre Cuvalci | 2022-03-08 |