Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Kong CHAN, Dongming Iu +1 more | 2022-05-31 |
MS
Matthew Spuller
Overall (2022): #340,242 of 548,613Top 65%
1
Patents 2022