Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Matthew D. Scotney-Castle, Norman L. Tam, Matthew Spuller, Kong CHAN +1 more | 2022-05-31 |
| 11342209 | Methods and apparatus for measuring edge ring temperature | Ji-Dih HU, Wolfgang Aderhold | 2022-05-24 |