| 11515132 |
Physical vapor deposition processing systems target cooling |
Vibhu Jindal, Vishwas Kumar Pandey |
2022-11-29 |
| 11480866 |
Method and apparatus to anneal EUV mask blank |
Herng Yau Yoong, Wen Xiao, Ribhu Gautam, Vibhu Jindal |
2022-10-25 |
| 11480865 |
Method and apparatus to improve EUV mask blank flatness |
Vibhu Jindal, Wen Xiao, Vinodh Ramachandran |
2022-10-25 |
| 11422096 |
Surface topography measurement apparatus and method |
Weimin Li, Wen Xiao, Vibhu Jindal |
2022-08-23 |
| 11410390 |
Augmented reality device for visualizing luminaire fixtures |
SANJEEV KUMAR PUVVADA SATHYANARAYANA, Pramod Kukhshal |
2022-08-09 |
| 11390940 |
System and method to control PVD deposition uniformity |
Wen Xiao, Vibhu Jindal |
2022-07-19 |
| 11387085 |
Multicathode deposition system |
Vibhu Jindal, Kamatchigobinath Manoharan |
2022-07-12 |
| 11365475 |
Physical vapor deposition chamber cleaning processes |
Vibhu Jindal, Shiyu Liu, Shuwei Liu, Wen Xiao |
2022-06-21 |
| 11290299 |
System and methods for cloud-based monitoring and control of physical environments |
Lee Brown, Marcin Gramza, Marcin Klecha, Lokesh Narayan Raj Urs, Natarajan Ganapathy Subramanian +4 more |
2022-03-29 |
| 11237473 |
Physical vapor deposition system and processes |
Vibhu Jindal, Wen Xiao |
2022-02-01 |
| 11236415 |
Deposition system with shield mount |
Vibhu Jindal |
2022-02-01 |
| 11230761 |
Deposition system with a multi-cathode |
Vibhu Jindal |
2022-01-25 |
| 11221599 |
Systems and methods for managing environmental conditions |
Mark Henricus Verberkt, Jurgen Mario Vangeel, Lokesh Narayan, Wijnand Johannes Rietman, Simon Dingle +4 more |
2022-01-11 |
