Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513437 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Vibhu Jindal | 2022-11-29 |
| 11454876 | EUV mask blank absorber defect reduction | Binni Varghese, Vibhu Jindal, Azeddine Zerrade, Ramya Ramalingam | 2022-09-27 |
| 11365475 | Physical vapor deposition chamber cleaning processes | Vibhu Jindal, Sanjay Bhat, Shuwei Liu, Wen Xiao | 2022-06-21 |
| 11334204 | Touch component, touch apparatus, and touch-control method | — | 2022-05-17 |
| 11300871 | Extreme ultraviolet mask absorber materials | Shuwei Liu, Vibhu Jindal, Azeddine Zerrade | 2022-04-12 |