Issued Patents 2022
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537040 | Extreme ultraviolet mask blank hard mask materials | Wen Xiao, Vibhu Jindal, Azeddine Zerrade | 2022-12-27 |
| 11513437 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal | 2022-11-29 |
| 11365475 | Physical vapor deposition chamber cleaning processes | Vibhu Jindal, Shiyu Liu, Sanjay Bhat, Wen Xiao | 2022-06-21 |
| 11327394 | Graded interface in bragg reflector | Wen Xiao, Vibhu Jindal, Weimin Li | 2022-05-10 |
| 11300871 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Vibhu Jindal, Azeddine Zerrade | 2022-04-12 |
| 11300872 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-04-12 |
| 11275304 | Extreme ultraviolet mask absorber matertals | Vibhu Jindal | 2022-03-15 |
| 11275300 | Extreme ultraviolet mask blank defect reduction | Sai Abhinand, Hui Ni Grace Fong, Ke Chang, Vibhu Jindal | 2022-03-15 |
| 11275302 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-03-15 |
| 11275303 | Extreme ultraviolet mask absorber matertals | Vibhu Jindal | 2022-03-15 |
| 11249388 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-02-15 |
| 11249390 | Extreme ultraviolet mask absorber materials | Vibhu Jindal, Halbert Chong | 2022-02-15 |
| 11249389 | Extreme ultraviolet mask absorber materials | Vibhu Jindal | 2022-02-15 |