Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537040 | Extreme ultraviolet mask blank hard mask materials | Shuwei Liu, Wen Xiao, Vibhu Jindal | 2022-12-27 |
| 11454876 | EUV mask blank absorber defect reduction | Binni Varghese, Vibhu Jindal, Shiyu Liu, Ramya Ramalingam | 2022-09-27 |
| 11300871 | Extreme ultraviolet mask absorber materials | Shiyu Liu, Shuwei Liu, Vibhu Jindal | 2022-04-12 |