Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454876 | EUV mask blank absorber defect reduction | Binni Varghese, Vibhu Jindal, Azeddine Zerrade, Shiyu Liu | 2022-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454876 | EUV mask blank absorber defect reduction | Binni Varghese, Vibhu Jindal, Azeddine Zerrade, Shiyu Liu | 2022-09-27 |