Issued Patents 2022
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537040 | Extreme ultraviolet mask blank hard mask materials | Shuwei Liu, Vibhu Jindal, Azeddine Zerrade | 2022-12-27 |
| 11480866 | Method and apparatus to anneal EUV mask blank | Herng Yau Yoong, Ribhu Gautam, Sanjay Bhat, Vibhu Jindal | 2022-10-25 |
| 11480865 | Method and apparatus to improve EUV mask blank flatness | Vibhu Jindal, Sanjay Bhat, Vinodh Ramachandran | 2022-10-25 |
| 11467499 | System and method of measuring refractive index of EUV mask absorber | Vibhu Jindal, Huajun Liu, Herng Yau Yoong | 2022-10-11 |
| 11422096 | Surface topography measurement apparatus and method | Weimin Li, Vibhu Jindal, Sanjay Bhat | 2022-08-23 |
| 11390940 | System and method to control PVD deposition uniformity | Vibhu Jindal, Sanjay Bhat | 2022-07-19 |
| 11385536 | EUV mask blanks and methods of manufacture | Vibhu Jindal | 2022-07-12 |
| 11366379 | Extreme ultraviolet mask with embedded absorber layer | Vibhu Jindal | 2022-06-21 |
| 11366059 | System and method to measure refractive index at specific wavelengths | Vibhu Jindal, Huajun Liu, Herng Yau Yoong | 2022-06-21 |
| 11365475 | Physical vapor deposition chamber cleaning processes | Vibhu Jindal, Shiyu Liu, Sanjay Bhat, Shuwei Liu | 2022-06-21 |
| 11352680 | Apparatus and method for rapidly heating cold-rolled strip steel | Huabing Zhang, Guobao Li, Baojun LIU, Dan Han, Xinqiang Zhang +3 more | 2022-06-07 |
| 11327394 | Graded interface in bragg reflector | Vibhu Jindal, Weimin Li, Shuwei Liu | 2022-05-10 |
| 11237473 | Physical vapor deposition system and processes | Vibhu Jindal, Sanjay Bhat | 2022-02-01 |