Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467499 | System and method of measuring refractive index of EUV mask absorber | Wen Xiao, Vibhu Jindal, Herng Yau Yoong | 2022-10-11 |
| 11366059 | System and method to measure refractive index at specific wavelengths | Wen Xiao, Vibhu Jindal, Herng Yau Yoong | 2022-06-21 |