Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480866 | Method and apparatus to anneal EUV mask blank | Wen Xiao, Ribhu Gautam, Sanjay Bhat, Vibhu Jindal | 2022-10-25 |
| 11467499 | System and method of measuring refractive index of EUV mask absorber | Wen Xiao, Vibhu Jindal, Huajun Liu | 2022-10-11 |
| 11366059 | System and method to measure refractive index at specific wavelengths | Wen Xiao, Vibhu Jindal, Huajun Liu | 2022-06-21 |