Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480865 | Method and apparatus to improve EUV mask blank flatness | Vibhu Jindal, Sanjay Bhat, Wen Xiao | 2022-10-25 |
| 11476097 | Common electrostatic chuck for differing substrates | Ananthkrishna Jupudi, Sarath Babu | 2022-10-18 |