| D973609 |
Upper shield with showerhead for a process chamber |
Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more |
2022-12-27 |
| D971167 |
Lower shield for a substrate processing chamber |
Sarath Babu, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more |
2022-11-29 |
| 11476097 |
Common electrostatic chuck for differing substrates |
Vinodh Ramachandran, Sarath Babu |
2022-10-18 |
| D967081 |
Microwave transmission window assembly |
Rajesh Kumar Putti, Prashant Agarwal |
2022-10-18 |
| 11375584 |
Methods and apparatus for processing a substrate using microwave energy |
Tuck Foong Koh, Yueh Sheng Ow, Nuno Yen-Chu Chen, Preetham Rao |
2022-06-28 |
| 11362404 |
Microwave window including first and second plates with vertical stepped areas configured for pressure sealing a dielectric plate between the first and second plates |
Rajesh Kumar Putti, Prashant Agarwal |
2022-06-14 |
| 11361981 |
Batch substrate support with warped substrate capability |
Shashidhara Patel, Ribhu Gautam |
2022-06-14 |
| 11328929 |
Methods, apparatuses and systems for substrate processing for lowering contact resistance |
Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Takashi Shimizu, Kelvin Boh +1 more |
2022-05-10 |
| 11289357 |
Methods and apparatus for high voltage electrostatic chuck protection |
Yuichi Wada, Yueh Sheng Ow, Clinton GOH, Kai Liang Liew, Sarath Babu |
2022-03-29 |
| 11251028 |
Pre-clean chamber with integrated shutter garage |
Cheng-Hsiung Tsai, Sarath Babu, Manjunatha Koppa, Hiroyuki Takahama |
2022-02-15 |
