Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D973609 | Upper shield with showerhead for a process chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2022-11-29 |
| 11476097 | Common electrostatic chuck for differing substrates | Vinodh Ramachandran, Ananthkrishna Jupudi | 2022-10-18 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Yueh Sheng Ow, Ananthkrishna Jupudi, Clinton GOH, Kai Liang Liew | 2022-03-29 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Manjunatha Koppa, Hiroyuki Takahama | 2022-02-15 |