Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Junqi Wei, Kelvin Boh, Yuichi Wada +1 more | 2022-11-29 |
| 11375584 | Methods and apparatus for processing a substrate using microwave energy | Tuck Foong Koh, Nuno Yen-Chu Chen, Ananthkrishna Jupudi, Preetham Rao | 2022-06-28 |
| 11328929 | Methods, apparatuses and systems for substrate processing for lowering contact resistance | Junqi Wei, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu, Kelvin Boh +1 more | 2022-05-10 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Ananthkrishna Jupudi, Clinton GOH, Kai Liang Liew, Sarath Babu | 2022-03-29 |