Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Yueh Sheng Ow, Ananthkrishna Jupudi, Clinton GOH, Sarath Babu | 2022-03-29 |
KL
Kai Liang Liew
Overall (2022): #381,533 of 548,613Top 70%
1
Patents 2022