Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yuichi Wada, Yueh Sheng Ow, Ananthkrishna Jupudi, Kai Liang Liew, Sarath Babu | 2022-03-29 |
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Overall (2022): #490,899 of 548,613Top 90%
1
Patents 2022