Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kang Zhang +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Yuichi Wada +1 more | 2022-11-29 |
| 11328929 | Methods, apparatuses and systems for substrate processing for lowering contact resistance | Yueh Sheng Ow, Junqi Wei, Wen Long Favier Shoo, Ananthkrishna Jupudi, Takashi Shimizu +1 more | 2022-05-10 |