Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D960216 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Steven V. Sansoni | 2022-08-09 |
| D947914 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Cheng-Hsiung Tsai, Steven V. Sansoni | 2022-04-05 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Sarath Babu, Hiroyuki Takahama | 2022-02-15 |
| D942516 | Process shield for a substrate processing chamber | Aravind Kamath, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2022-02-01 |