Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D960216 | Base plate for a processing chamber substrate support | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2022-08-09 |
| D947914 | Base plate for a processing chamber substrate support | Mukund Sundararajan, Cheng-Hsiung Tsai, Manjunatha Koppa, Steven V. Sansoni | 2022-04-05 |