Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532547 | Interconnect structures with low-aspect-ratio contact vias | Ming-Han Lee, Chung-Ju Lee | 2022-12-20 |
| 11508610 | Substrate support with edge seal | Chang Ke, Bonnie T. Chia, Song-Moon Suh, Yuanhong Guo, Lei Zhou +1 more | 2022-11-22 |
| D960216 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2022-08-09 |
| 11393718 | Semiconductor structure and method for forming the same | Hwei-Jay CHU, Chieh-Han Wu, Chih Wei Lu, Chung-Ju Lee | 2022-07-19 |
| D947914 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2022-04-05 |
| 11251118 | Self-aligned via structures with barrier layers | Chieh-Han Wu, Chih Wei Lu, Chung-Ju Lee | 2022-02-15 |
| 11251028 | Pre-clean chamber with integrated shutter garage | Ananthkrishna Jupudi, Sarath Babu, Manjunatha Koppa, Hiroyuki Takahama | 2022-02-15 |
| D942516 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2022-02-01 |