Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508610 | Substrate support with edge seal | Chang Ke, Bonnie T. Chia, Song-Moon Suh, Cheng-Hsiung Tsai, Lei Zhou +1 more | 2022-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508610 | Substrate support with edge seal | Chang Ke, Bonnie T. Chia, Song-Moon Suh, Cheng-Hsiung Tsai, Lei Zhou +1 more | 2022-11-22 |