Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508610 | Substrate support with edge seal | Chang Ke, Bonnie T. Chia, Cheng-Hsiung Tsai, Yuanhong Guo, Lei Zhou +1 more | 2022-11-22 |
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Kishor Kalathiparambil +1 more | 2022-10-18 |
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Chang Ke | 2022-09-13 |