Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495440 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah +1 more | 2022-11-08 |
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Zhili Zuo, Chang Ke, Song-Moon Suh | 2022-09-13 |