Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Chang Ke, Song-Moon Suh | 2022-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Chang Ke, Song-Moon Suh | 2022-09-13 |