Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Kishor Kalathiparambil, Vanessa Faune +1 more | 2022-10-18 |
| 11347846 | Real-time monitoring and policy enforcement of active applications and services | Anantha K. Boyapalle, Abeye Teshome | 2022-05-31 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Adolph Miller Allen, Vanessa Faune, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani +5 more | 2022-03-29 |