Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Suhas Bangalore Umesh, Preetham Rao, Shirish A. PETHE, Fuhong Zhang, Martin Lee Riker +1 more | 2022-11-08 |
| 11473189 | Method for particle removal from wafers through plasma modification in pulsed PVD | Halbert Chong, Lei Zhou, Adolph Miller Allen, Vaibhav Soni, Vanessa Faune +1 more | 2022-10-18 |
| 11289312 | Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability | Adolph Miller Allen, Vanessa Faune, Zhong Qiang Hua, Kirankumar Neelasandra SAVANDAIAH, Anantha K. Subramani +5 more | 2022-03-29 |
| 11222816 | Methods and apparatus for semi-dynamic bottom up reflow | Lanlan Zhong, Shirish A. PETHE, Fuhong Zhang, Joung Joo Lee, Xiangjin Xie +1 more | 2022-01-11 |