Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492699 | Substrate temperature non-uniformity reduction over target life using spacing compensation | Preetham Rao, Shirish A. PETHE, Fuhong Zhang, Kishor Kalathiparambil, Martin Lee Riker +1 more | 2022-11-08 |