Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D942516 | Process shield for a substrate processing chamber | Manjunatha Koppa, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2022-02-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D942516 | Process shield for a substrate processing chamber | Manjunatha Koppa, Cheng-Hsiung Tsai, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2022-02-01 |