Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Sarath Babu, Manjunatha Koppa | 2022-02-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251028 | Pre-clean chamber with integrated shutter garage | Cheng-Hsiung Tsai, Ananthkrishna Jupudi, Sarath Babu, Manjunatha Koppa | 2022-02-15 |