Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275300 | Extreme ultraviolet mask blank defect reduction | Shuwei Liu, Hui Ni Grace Fong, Ke Chang, Vibhu Jindal | 2022-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275300 | Extreme ultraviolet mask blank defect reduction | Shuwei Liu, Hui Ni Grace Fong, Ke Chang, Vibhu Jindal | 2022-03-15 |