Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11239058 | Protective layers for processing chamber components | Karthikeyan Balaraman, Balamurugan Ramasamy, Kartik Shah, Mats Larsson, Rajasekhar PATIBANDLA +2 more | 2022-02-01 |