Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492704 | Chamber injector | Lit Ping LAM, Preetham Rao, Kartik Shah, Ian Ong, Nyi O. Myo +1 more | 2022-11-08 |
| 11261538 | In-situ temperature mapping for epi chamber | Ala Moradian, Zuoming ZHU, Patricia M. Liu, Flora Fong-Song CHANG, Enle CHOO +1 more | 2022-03-01 |