Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11261538 | In-situ temperature mapping for epi chamber | Zuoming ZHU, Patricia M. Liu, Shu-Kwan LAU, Flora Fong-Song CHANG, Enle CHOO +1 more | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11261538 | In-situ temperature mapping for epi chamber | Zuoming ZHU, Patricia M. Liu, Shu-Kwan LAU, Flora Fong-Song CHANG, Enle CHOO +1 more | 2022-03-01 |