Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2022-06-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2022-06-28 |